Applications

Atomic Layer Deposition

Atomic Layer Deposition

State-of-the-art ALD systems for research and development through to full scale production. Includes the Plasma Enhanced ALD (PEALD), Roll-To-Roll ALD systems, Powder Coating ALD systems & Vacuum Cluster tools.

Atomic Layer Deposition

State-of-the-art ALD systems for research and development through to full scale production. Includes the Plasma Enhanced ALD (PEALD), Roll-To-Roll ALD systems, Powder Coating ALD systems & Vacuum Cluster tools.
Atomic Layer Deposition
Thin Film Evaporation Sputtering, Ion Beam Etch, PECVD

Thin Film Evaporation Sputtering, Ion Beam Etch, PECVD

NANOQUEST Ion Beam Etch Systems, NANOCHROME PVD systems, (Ion beam assisted deposition, E-Beam evaporation, Thermal evaporation, RF, AC & Magnetron. Sputtering, Co-evaporation), PECVD for Diamond-like Carbon (DLC)

Thermal Processing

Horizontal R & D and Production Furnaces, horizontal and vertical Furnace Elements Insulation and Vestibule Blocks, Astra Furnace Controller, Vacuum & Convection Ovens.
 Thermal Processing
 Thermal Processing

Thermal Processing

Horizontal R & D and Production Furnaces, horizontal and vertical Furnace Elements Insulation and Vestibule Blocks, Astra Furnace Controller, Vacuum & Convection Ovens.
Wet processing, Chemical Heaters and Megasonics

Wet processing, Chemical Heaters and Megasonics

Manual/semi-auto and fully automatic wet stations, chemical distribution systems in-line & immersion chemical heaters, ultra-pure DI water heaters, megPie single wafer radial megasonic transducer. Stainless, quartz or kynar direct-coupled megasonic tank systems. Custom immersible megasonic trays.

Megasonics

Using high-frequency acoustic energy, our advanced megasonics technology enables tighter control over substrate cleaning processes making them faster and more efficient.
We offer a wide range of solutions for both single wafer and batch cleaning including custom system designs to solve a variety of difficult contamination-sensitive cleaning issues.
Megasonics
Megasonics

Megasonics

Using high-frequency acoustic energy, our advanced megasonics technology enables tighter control over substrate cleaning processes making them faster and more efficient.
We offer a wide range of solutions for both single wafer and batch cleaning including custom system designs to solve a variety of difficult contamination-sensitive cleaning issues.
 Handling & Automation

Handling & Automation

Mass wafer transfer systems, SMIF pod/de-pod,  sorters, EFEMs, reticle storage systems, RFID tracking systems, 450mm FOUP, EUV pod openers.

Probe, Test & Burn-in

Probe & Test: Epoxy & blade probe cards, probe needle/socket cleaning, chuck cleaning wafers. Vacuum Traps: High capacity vacuum inlet traps, foreline traps, oil mist eliminators, Oil Filtration & Vacuum Degassing systems. Intelligent Fluid: Water based cleaning fluids for catch cup cleaning, resist stripping and lift-off
Probe, Test & Burn-in
Probe, Test & Burn-in

Probe, Test & Burn-in

Probe & Test: Epoxy & blade probe cards, probe needle/socket cleaning, chuck cleaning wafers. Vacuum Traps: High capacity vacuum inlet traps, foreline traps, oil mist eliminators, Oil Filtration & Vacuum Degassing systems. Intelligent Fluid: Water based cleaning fluids for catch cup cleaning, resist stripping and lift-off
Vacuum

Vacuum

At the MV Products Division of Mass-Vac they are continually conducting research and development devoted to improving the quality and effectiveness of their products. Their product lines fall into three basic categories: Vacuum Inlet Traps, Vacuum Pump Accessories, and Degassing Systems.

Resist strip cleaning

Intelligent fluids GmbH has developed cleaning fluids which can remove persistent pollutants and organic materials in the microelectronic sector.
Resist strip cleaning
Resist strip cleaning

Resist strip cleaning

Intelligent fluids GmbH has developed cleaning fluids which can remove persistent pollutants and organic materials in the microelectronic sector.
Mask Aligners

Mask Aligners

Advanced contact/Proximity Mask Aligners. Incredibly fast and accurate electromagnetic linear stage motors, superior auto alignment, Integrated OBS and IR backside alignment, dual arm robot and pre-aligner optimized for highest through-put. 1x proximity stepper for full field or step and repeat exposures. Available in Roll to Roll or large area substrate formats.

Spin, coat, develop, bake & clean tools, Bonder & De-Bonders

Originally a division of Brewer Science Inc., the Cee® business owned and staffed by former employees of Brewer Science.
Spin, coat, develop, bake & clean tools, Bonder & De-Bonders
Spin, coat, develop, bake & clean tools, Bonder & De-Bonders

Spin, coat, develop, bake & clean tools, Bonder & De-Bonders

Originally a division of Brewer Science Inc., the Cee® business owned and staffed by former employees of Brewer Science.
Particle Detection systems

Particle Detection systems

Wafer Inspection Services, Inc ™ manufactures Particle Detection Systems for several applications. Our low cost Reticle base unit is the PDS 1020-G2, adaptable for wafers.