RCH Associates specializes in new LPCVD/Diffusion systems as well as replacement OEM gas systems (Thermco, Bruce, Tempress, ACS, etc.) fully retrofittable into existing or remanufactured source cabinets. RCH’s portfolio of products and capabilities extends from basic Bench Top Furnaces or Research Grade systems to high production, full capability horizontal stacks.
RCH

Diffusion Furnaces

Furnace Processing Systems

Diffusion, Oxidation and LPCVD furnace processing systems for semiconductor and solar applications.
Furnace Processing Systems
ASTRA Control System

ASTRA Control System

RCH Associates’ flagship product that provides total programming, operation and data management of diffusion and LPCVD furnace processing systems. Provides full computer power per tube-level with graphical, touch screen program access.

Gas Systems and Liquid Source Delivery Systems

Gas systems and liquid source delivery systems for diffusion and LPCVD processing.
Custom fabrication and assembly for specialized applications.
Gas Systems and Liquid Source Delivery Systems
Load Stations and Loading Systems

Load Stations and Loading Systems

Clean room load stations.
Paddle and twin rod cantilever loading systems, push/pullers and auto lifters.

Source Gas Cabinets and Source/Vacuum Pump Cabinets

Fully facilitated gas source cabinets configured for atmospheric or LPCVD processes.
Stand-alone or stacked pump cabinets with vacuum pump and control systems.
Source Gas Cabinets and Source/Vacuum Pump Cabinets
VAF - Vacuum Annealing Furnace System

VAF - Vacuum Annealing Furnace System

Specialized vacuum furnace system for thin film thermal processing of wafers and substrates that are sensitive to oxidation.
Applicable to metallization anneal/alloy and anneal of antireflective solar cell coatings and other materials.

Retrofits and Components

Atmospheric and LPCVD processing systems retrofittable to most existing and new furnace system. “Fast Flange” assemblies, elements and gas systems. Quartz and silicon carbide components. Replacement and spare parts.
Retrofits and Components