Wafer Inspection Services (WIS)

Wafer Inspection Services, Inc ™ manufactures Particle Detection Systems for several applications. Our low cost Reticle base unit is the PDS 1020-G2, adaptable for wafers.

WIS

PDS-1020-G2

  • Sub-micron particle detection
  • Simultaneous Dual Sided Inspection
  • Low cost of ownership
  • No Preventive Maintenance
  • Manual load or automated
  • Stockers / Cleaners / In line inspection
  • Small footprint approximately 40cm cubed
  • Easily adaptable for other substrates
  • MTBF 10+ Years
PDS-1020-G2
ES-240 Automatic Inspection System for Wafers, Reticles, Flat Panel Displays

ES-240 Automatic Inspection System for Wafers, Reticles, Flat Panel Displays

The ES-240, designed for inspecting wafers, reticles and flat panel displays. Benefits include: batch loads, ease of use, multiple illumination modes, including transmitted or reflected dark or bright field illumination, and flexibility in inspecting different size parts (from 10mm x 10mm to 250mm x250mm).  The system will detect pattern defects, surface particles, inclusions, scratches and stains. Detectable defects range in size from 0.5 microns to larger than 100 microns. Additional system features include: robotic handling option, auto review after inspection; easy-to-read flat panel display;

Replacement Lasers

New OR Refurbished Lasers for:
  • KLA-Tencor defect inspection systems
  • Ultrapointe
  • ADE
  • Thermawave
Replacement Lasers
NIST Traceable Calibration Standards using PSL spheres

NIST Traceable Calibration Standards using PSL spheres

NIST Traceable Calibration Standards using PSL spheres