Introducing the V3000 Macro-Scope Defect Review System

Discover the C&D Semiconductor V3000 Macro-Scope Defect Review System, a state-of-the-art, dual-cassette, all-in-one wafer inspection system designed to streamline and enhance both macro and micro inspections of wafers. The V3000 combines efficiency, performance, and versatility in one integrated system, making it an indispensable optical defect inspection tool in semiconductor manufacturing.

Comprehensive Inspection Capabilities

The V3000 Macro-Scope Defect Review System enables seamless transition between macro inspection and detailed microscopic analysis, allowing for quick defect identification and precise examination. It handles wafers ranging from 50 mm to 300 mm and comes equipped with a high-speed motorised stage for rapid and accurate positioning.

Dual Inspection Modes

• Macro Inspection: Utilises up to six different light sources to highlight various defects such as scratches, resist striations, and particles. The innovative bright light station, coupled with a 3-axis gimble chuck, allows for dynamic viewing angles and rotations, ensuring comprehensive coverage of the wafer surface.
• Microscope Inspection: Features the renowned Leica DM8000 microscope for high magnification imaging. This step provides a detailed view of any anomalies detected during the macro inspection, facilitated by an intuitive software that commands the precision XY motorized stage.

Ergonomic and Efficient Design

The V3000 Macro-Scope Defect Review System is engineered with the operator’s comfort and efficiency in mind. The ergonomic design of the cassette platform reduces strain during loading and unloading, while the easily accessible controls and adjustable displays ensure a user-friendly interface. This thoughtful design minimises operator fatigue and boosts productivity.

Advanced Features for Enhanced Performance

• Automated Image Capture: Streamlines the inspection process by capturing full wafer images, which are crucial for thorough analysis.
• Dual Cassette System: Increases throughput and maximises operational efficiency.
• Front and Backside Wafer Inspection: Provides a complete review of both surfaces of the wafer.

Powerful Database Management Software

The V3000 isn’t just a tool for inspection – it’s a comprehensive management solution. It features powerful software that logs defects, classifies them, and stores images and wafer IDs for easy retrieval and analysis. This database capability is essential for tracking trends and improving wafer yields.

Key Features

• CE Marked: Ensures compliance with European Union safety standards.
• PC Windows-based Interface: Offers a familiar and intuitive user interface for operators.

Customisable Options

To cater to diverse manufacturing needs, the V3000 offers several additional features:

• Backside Inspection: For a thorough inspection of the wafer’s underside.
• Dual-Size Bridging: Allows handling of different wafer sizes without equipment adjustments.
• Wafer Alignment: Ensures precise placement of wafers for inspection.
• SECS/GEM Compliance: Guarantees compatibility with global standards for equipment communication in semiconductor manufacturing.

The C&D Semiconductor V3000 Macro-Scope Defect Review System is your solution to the challenges of wafer inspection, offering unparalleled detail, efficiency, and ease of use. Embrace the next level of defect detection and quality assurance in semiconductor manufacturing with the V3000.

Contact us to learn more about how this advanced system can fit into your production line and significantly enhance your inspection processes.