Fortrend 300mm Load Port (FOUP Opener)

SiSTEM Technology is proud to introduce the Fortrend 300mm Load Port, the leading choice for advanced wafer handling within the semiconductor industry. This FOUP (Front Opening Unified Pod) opener is specifically engineered for compatibility with SEMI 300mm FOUP standards, ensuring seamless integration with your existing systems.

Standard Features

• SEMI Compatibility: Fully supports SEMI standards including E15.1, E47.1, E57, E62, E64, E83, E110, S2, and S8.
• Interface Standards Compliance: Adheres to both SEMI E63 BOLTS-M and E92 BOLTS Light interface standards, guaranteeing broad compatibility.
• Advanced Sensing Functions: Equipped with comprehensive status sensing capabilities:
  • FOUP Presence
  • FOUP Placement
  • FOUP Dock
  • FOUP Door Presence
  • Wafer Protrusion
  • Finger Pinch Safety Sensor
  • Vacuum Pressure Monitoring
• Modular Design: Minimises the need for adjustments, reduces maintenance requirements, and decreases downtime.
• Communication: Features an RS232 communication interface for reliable data transmission.
• Mapping Function: Enhances the accuracy of wafer positioning within the FOUP.
• Class 1 Cleanliness: Maintains the highest standards for a controlled environment.
• S2S8 Certification: Ensures compliance with safety and environmental standards.

Optional Enhancements

• Optical PIO Sensor: For improved precision in pod handling.
• Info Pad Sensor: For enhanced data collection capabilities.
• N2 Purge Interface: Allows for nitrogen environment control within the FOUP.
• 200mm Adaptor: Enables compatibility with 200mm wafers and carriers.
• 200mm Wafer Mapping: Extends the functionality to include 200mm wafer handling.
• RFID Reader/Writer for 200mm Wafer Cassettes: For advanced tracking and management of wafer data.

Specifications

• Model: FO-3100-XYZ
• Wafer Size Carrier Type: 300mm FOUP, complying with SEMI 47.1
• Dimensions: 472(W) x 493(D) x 1386(H) mm
• Weight: 66 kg
• Mounting Height: 900mm±10mm
• Bolting: ISO M8-6H
• Cleanliness Level: Class 1 at 0.1μm with mapping
• Operation Time: FOUP open in 17 seconds, close in 10 seconds
• Communication: Serial RS-232, Parallel I/O
• RFID Capability: TI 134.2kHz
• Power Requirements: +24VDC, 5A

For further models and their specifications, please download the brochure.

Facility Requirements

• Vacuum: -80kpa
• CDA: 5kg/cm²

The Fortrend 300mm Load Port (FOUP Opener) represents a significant step forward in wafer handling technology, providing not only robust protection for wafers but also enhancing the efficiency and cleanliness of semiconductor manufacturing processes. Ideal for facilities looking to upgrade to SMIF compatibility, this load port is designed to meet the needs of high-tech semiconductor fabrication settings. For more information or to request a quote, please contact us.