Resist strip cleaning

Intelligent fluids GmbH has developed cleaning fluids which can remove persistent pollutants and organic materials in the microelectronic sector.
Different formulations are capable of removing a multitude of different carbon modifications (e.g. graphene,C 60, C 70), organic compounds and also insulating layers (e.g. polyimides) and metal depossitions (Ag, Au, Cu, Si etc.). Special printing inks for printed electronic circuits as well as photoresist layers can be removed.
Intelligent fluids

Advantages of Intelligent Fluid

  • Water Based
  • Physical Function (no chemical attack)
  • Biodegradable
  • Dermatologically approved
  • Non-inflammable
  • pH-neutral
  • Thermodynamically stable

Typical Applications

  • Equipment Cleaning - Catch Cups,
  • Chambers, Furnaces, Parts
  • Metal Lift-Off - MEMS, LED, BEOL
  • Photoresist Stripping - FEOL, BEOL, BE, Photo Mask Applications
  • Adhesive Removal - Flat Panel Display, Temporay Bonding
  • Glass and Lens Cleaning - Removal of Oils, Fingerprints and Organics
  • Replacment of - NMP, DSMO, SPM, Acetone
Intelligent Fluids
Intelligent Fluids
Intelligent Fluids