Wet processing, Chemical Heaters and Megasonics

Chemical Safety Technology is a recognized leader of chemical, slurry and semi-automated wet process benches for the semiconductor and
disk manufacturing industries. The company designs, manufactures, installs and services mix/dispense and wet cleaning equipment.

Chemical Safety Technology

Wet Benches and Chemical Delivery

Available equipment:

Bulk chemical dispense systems
Slurry mix and dispense systems
Total facility chemical management with supervisory computers
Plating stations (manual, semi and auto) with a standard or a unique fixture-less plating cell
Robotic cleaning lines
Mini-environments, Class 10 to 100000
Custom wet process benches
Custom HEPA or ULPA carts
Portable HEPA or ULPA carts
Portable chemical handling equipment
Chemical dosing systems, feed and bleed
Fire suppression for the solvent systems
Wet Bench 4 robot system
Chemical Delivery system
Waste Collection System
Chemical Cart

Product Systems Inc.

Product Systems Inc.

Megasonics

Using high-frequency acoustic energy, our advanced megasonics technology enables tighter control over substrate cleaning processes making them faster and more efficient.
We offer a wide range of solutions for both single wafer and batch cleaning including custom system designs to solve a variety of difficult contamination-sensitive cleaning issues.
Table top cleaning system

Table top cleaning system

The Tabletop Megasonic cleaning system brings Megasonics to the laboratory tabletop. This small, compact system enables a researcher to experiment with Megasonic acoustic energy at
a fraction of the cost of a wet bench processing station. This versatile Megasonic cleaner can clean a wide variety of substrates, one at a time.

Bowl Meg

The ProSys Bowl Meg is a small Megasonic systems for performing experiments with acoustic energy on very small parts or die. It is compatible
with strong acids, bases, and most solvents. It has a 30mm-diameter transducer is easy to install and use and offers inexpensive acoustic process testing.
Bowl Meg
Meg Pie

Meg Pie

The MegPie is a single-wafer Megasonic transducer for cleaning and sonochemical processing of wafers. It applies a uniform dose of acoustic energy to the rotating substrate. The MegPie will improve process efficiency and lower process time. And it is easy to retrofit to your single-substrate processing tool.

Process Tank Options

Stainless steel, quartz and Kynar® tanks are available in ProSys Megasonic cleaning systems. Small, compact and custom sizes available. Quick dump rinse (QDR) configurations, standard sizes up to 300mm.
Process Tank Options
Process Technology's high purity products for wet process manufacturing applications include: fluoropolymer and quartz UPDI water heaters, inline chemical heaters, solvent heaters, nitrogen heaters, constant temperature baths, electric immersion heaters, inline heat exchangers, and high temperature filter chambers.
Process Technology

High Purity DI water Heaters

UPDI

Designed for the ultra-pure demands of high purity industries, Process Technology offers a full line of deionized water heaters designed for your most demanding applications. Sizes range from 3,000 watts up to 260,000 watts. The patented
designs incorporate unique features for superior thermal response. All DI water heaters are available in quartz or fluoropolymer wetted parts
for the most demanding high purity applications.
High purity heaters are assembled in an ISO5 (Class 100) cleanroom and its patented “purged” resistive element design offers exceptional MTBF of ten years.

Tytan

The Tytan™ brand represents the safest and most reliable industrial deionized water heater on the market. Featuring a compact, self-contained heater and control package for ultra-fast heat up and superior temperature stability regardless of application, Tytan™ is available in sizes up to 144kW, wall-mounted up to 72kW. Installation is fast and easy, and the TytanTM requires virtually no maintenance.

Markets:

Semiconductor
FPD
MEMS
Nanotechnology
Photovoltaic (solar cell)
LCD
Biomedical
Pharmaceutical
UPDI
Tytan
HotShot Quartz Water Heater
Markets

Chemical/Gas Inline and Immersion Heaters

Inline

Inline chemical heaters are used in wet process manufacturing applications where Inline heating is preferred over immersion heating methods. Process Technology inline heaters are manufactured in fluoropolymer and high purity quartz materials with sizes up to 18,000 watts. A large variety of standard and custom configurations are available. Applications include temperatures up to 180 degrees centigrade.

Immersion

Process Technology electric immersion heaters are designed for a spectrum of industrial applications from water to the demands of corrosive chemical heating, with a vast array of configurations available such as open tank, screw plug and flange. A wide variety of sheath materials ensure heater longevity regardless of the chemistry, including: fluoropolymer, quartz, titanium, 316 stainless steel, 304 stainless steel and plain steel. Immersion heater sizes range from as small as 100 watts for laboratory
environments to as large as 54,000 watts (flange heaters up to 270,000 watts) for industrial applications.

SoltaN2 system

The SH Series system is an electric inline heater designed to safely heat process gas or solvents through indirect contact instead of direct immersion. SoltaN2™ inline solvent & nitrogen heaters deliver superior temperature stability with changes in flow and offer redundant temperature sensors for safe operation.

Heat Exchangers

Our heat exchangers and heating and cooling coils are designed for the high demands of corrosive chemical heating. A wide variety of standard and custom configurations are available. Materials of construction include: fluoropolymer, titanium, 316 stainless steel, plain steel, and several exotic metals such as Zirconium.
Inline
Immersion
SoltaN2 system
Heat exchanger