Wet processing, Chemical Heaters and Megasonics
Chemical Safety Technology is a recognized leader of chemical, slurry and semi-automated wet process benches for the semiconductor and
disk manufacturing industries. The company designs, manufactures, installs and services mix/dispense and wet cleaning equipment.
Wet Benches and Chemical Delivery
Slurry mix and dispense systems
Total facility chemical management with supervisory computers
Plating stations (manual, semi and auto) with a standard or a unique fixture-less plating cell
Robotic cleaning lines
Mini-environments, Class 10 to 100000
Custom wet process benches
Custom HEPA or ULPA carts
Portable HEPA or ULPA carts
Portable chemical handling equipment
Chemical dosing systems, feed and bleed
Fire suppression for the solvent systems
Product Systems Inc.
We offer a wide range of solutions for both single wafer and batch cleaning including custom system designs to solve a variety of difficult contamination-sensitive cleaning issues.
Table top cleaning system
a fraction of the cost of a wet bench processing station. This versatile Megasonic cleaner can clean a wide variety of substrates, one at a time.
with strong acids, bases, and most solvents. It has a 30mm-diameter transducer is easy to install and use and offers inexpensive acoustic process testing.
Process Tank Options
High Purity DI water Heaters
designs incorporate unique features for superior thermal response. All DI water heaters are available in quartz or fluoropolymer wetted parts
for the most demanding high purity applications.
High purity heaters are assembled in an ISO5 (Class 100) cleanroom and its patented “purged” resistive element design offers exceptional MTBF of ten years.
Photovoltaic (solar cell)
Chemical/Gas Inline and Immersion Heaters
environments to as large as 54,000 watts (flange heaters up to 270,000 watts) for industrial applications.