Heater Block and Pedestal – Resistance Smart sensor

InControl Engineering’s smart sensor technology utilizes high speed measurement and edge processing to advance your predictive maintenance capabilities beyond what is achievable with traditional SECS/GEM based data collection and analysis. Use Industry 4.0 to connect your equipment, manufacturing process and personnel closer than ever before to improve equipment reliability and availability.

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Benefits

Reduces wafer scrap and rework
Eliminates unscheduled maintenance downtime Lowers equipment cost of ownership
Prevents equipment damage
Monitors when equipment is idle
Tool-to-tool matching and benchmarking
Fast same day integration

 

 

Real-time resistance measurements show heating element wire degradation over heater block and pedestal lifespan. Dynamic resistance spiking is a reliable indicator of a near-term failure. Degradation and failure of the solid-state relays as well as faulty wiring and contacts can also be detected through these same resistance measurements.
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Specifications

Monitor up to 5 pedestals or heating zones
10kHz measurement sampling frequency
Split core AC current transformers: 1A-200A
Adjustable AC voltage measurement range: 0-360V
TC input: K, S, R, E, J, T, B, N, & WRe5-WRe26
RTD input: Pt100 & Cu50
Dry contact alarm relay
Resistance measurement analog outputs
100 Base Ethernet port
2.4Ghz 802.11n wireless LAN
Power: 100-240VAC 50/60Hz 0.5A/0.25A

2-Zone Module: 7.75” L x 4” W x 4.5” H
(247.7mm L x 101.6mm W x 114.3mm H)
5-Zone Module: 9.75” L x 4” W x 4.5” H
(247.7mm L x 101.6mm W x 114.3mm H) Current Transformer: 2” L x 2.1” W x 0.6” H
(50.8mm L x 53.3mm W x 15.5mm H) up to 0.75” Ø (19.1mm) cables
GUI web server (NGINIX)
NTP time synchronization
SMTP e-mail interface
One-year hardware warranty
User upgradable software

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TRUE PREDICITVE MAINTENANCE
Replace heater blocks and pedestals based on their observed element health rather than hours in service

PRECISION RESISTANCE MEASUREMENT
Measures the actual current and voltage waveforms (not RMS)

MODELING AND DATA ANALYTICS WITH HEALTHMETRICS
Custom algorithms provide fault detection and classification of different failure conditions

FAULT NOTIFICATION
Easily integrate alarms directly to the equipment control system and automatically send e-mail or SMS messages

EQUIPMENT HEALTH MONITORING AT YOUR FINGERTIPS v Access anywhere with a web browser on your smartphone, tablet or personal computer

INSTANT DATA STORAGE AND VISUALIZATION
Collect, store, and visualize up to a year of resistance data directly on the smart sensor

EXTERNAL DATA ANALYSIS
Export data from GUI into Microsoft Excel

SOFTWARE A P I
Easily integrate smart sensor data with any factory system for collection and analysis