Product Systems Inc.

Product Systems Inc


Using high-frequency acoustic energy, our advanced megasonics technology enables tighter control over substrate cleaning processes making them faster and more efficient.
We offer a wide range of solutions for both single wafer and batch cleaning including custom system designs to solve a variety of difficult contamination-sensitive cleaning issues.
Table top cleaning system

Table top cleaning system

The Tabletop Megasonic cleaning system brings Megasonics to the laboratory tabletop. This small, compact system enables a researcher to experiment with Megasonic acoustic energy at
a fraction of the cost of a wet bench processing station. This versatile Megasonic cleaner can clean a wide variety of substrates, one at a time.

Bowl Meg

The ProSys Bowl Meg is a small Megasonic systems for performing experiments with acoustic energy on very small parts or die. It is compatible
with strong acids, bases, and most solvents. It has a 30mm-diameter transducer is easy to install and use and offers inexpensive acoustic process testing.
Bowl Meg
Meg Pie

Meg Pie

The MegPie is a single-wafer Megasonic transducer for cleaning and sonochemical processing of wafers. It applies a uniform dose of acoustic energy to the rotating substrate. The MegPie will improve process efficiency and lower process time. And it is easy to retrofit to your single-substrate processing tool.

Process Tank Options

Stainless steel, quartz and Kynar® tanks are available in ProSys Megasonic cleaning systems. Small, compact and custom sizes available. Quick dump rinse (QDR) configurations, standard sizes up to 300mm.
Process Tank Options


SiSTEM Technology Limited
Grafton Suite, 
Caswell Science & Technology Park
NN12 8EQ , UK


+44 1327 317621

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