Discover the V2000 Bright Light Wafer Inspection System

Explore the C&D Semiconductor V2000 Bright Light Inspection System, a dual-cassette, tabletop wafer optical defect inspection system designed to enhance defect detection across semiconductor wafers. With its advanced features and user-friendly design, the V2000 is engineered to improve yield by significantly reducing the time spent on manual microscope inspection.

Enhanced Defect Detection

The V2000 Bright Light Inspection System leverages a combination of up to four distinct light types, each meticulously selected to reveal different types of wafer defects effectively:

• Super Bright Line Light: Highlights surface particles with collimated high-angle dark illumination.
• Bright Light: Detects resist striation caused by particles present before the spin coat.
• Monochromatic Pink Light: Identifies minuscule stepper focus spots.
• Monochromatic Green Light: Reveals photoresist drips.
• Bright LED Topside Illumination: Shows die damage from process tools.

These sophisticated lighting options allow for quick defect identification, reducing the need for extensive microscope use and minimising operator fatigue.

Dual Operation Modes

Operate the V2000 in either automatic or manual mode, offering flexibility and efficiency in handling. Whether you are running standardised procedures or performing detailed inspections, the Bright Light Inspection System’s smartview GUI facilitates seamless interaction through an intuitive touchscreen interface.

Key Features

• Cassette Mapping: Automatically identifies and displays cassette contents.
• Ergonomic Control Panel: Designed for comfort and ease of use.
• 3-Axis Tilt and Rotate Gimble Chuck: Precisely manipulates the wafer for thorough inspection.
• Light-Controlled Inspection Housing: Creates an optimal environment for defect detection.
• CE Marked: Complies with European Union regulatory standards.

Options for Enhanced Functionality

• Four Light Configuration: Customise your lighting to target specific defect types.
• Backside Inspection: Inspects the entire underside of the wafer, excluding the vacuum grip area.
• Dual-Size Bridging: Easily switch between different wafer sizes.
• Barcode Download: Integrates with your systems for easy tracking.
• SECS/GEM Compliance: Ensures compatibility with global manufacturing standards.

Benefits of Using the V2000

• Reduce Microscope Inspection Time: Our clients have cut microscope inspection by up to 90%, saving cost, time, and energy.
• Improve Quality and Yield: Quick identification of defects enhances overall product quality and yield from the lithography area.
• User-Friendly Interface: Simple ‘Single Click’ operation with easily programmable recipes.

Technical Specifications

• Substrate Size Compatibility: 50 mm to 200 mm
• Interface: Touchscreen PC-based software
• Lights: Up to four configurable lights
• Dimensions: 45” Length x 34” Depth
• Facility Requirements: Vacuum: 25” / 600 mm Hg, 110/220V 15A

Options

• OCR (top and bottom)
• Digital image capture
• Notch/flat find
• Multiple lights (Spot, dark field, multiple spectrum neon, monochromatic green, other custom lights)
• Backside inspection
• SECS/GEM
• Multiple wafer sizes without hardware change

The C&D Semiconductor V2000 Bright Light Wafer Inspection System is an indispensable tool for semiconductor fabrication sites aiming to enhance operational efficiency and product quality. Its advanced features and ergonomic design make it a superior choice for detecting a wide range of defects with greater speed and accuracy.

Contact us to learn more about how the V2000 Bright Light Inspection System can transform your wafer inspection processes and significantly improve your manufacturing outcomes.